FIB lift-out specimen preparation techniques:​ ex-situ and in-situ methods

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Giannuzzi, L. A.¹; Kempshall, B. W.²; Schwarz, S. M.^2,3; Lomness, J. K.³; Prenitzer, B. I.²; Stevie, F. A.⁴

FIB lift-out specimen preparation techniques: ex-situ and in-situ methods

Affiliations

¹FEI Company, Hillsboro, OR, OR, 97124

²NanoSpective Inc., Orlando, FL, 32826

³University of Central Florida, Department of Mechanical Materials and Aerospace Engineering, Orlando, FL, 32816

⁴North Carolina State University, Analytical Instrumentation Facility, Raleigh, NC, 27695
Abstract and keywords

In this chapter, we review methods and applications of the FIB lift-out specimen preparation technique. A historical overview of the development of the technique is given. The ex-situ and in-situ lift-out techniques are described. Examples, advantages, and disadvantages of each of the techniques are presented.

Keywords: Focused ion beam; FIB; lift-out; LO; TEM; in-situ LO; INLO; ex-situ LO; EXLO; micromanipulation
Links

DOI: 10.1007/0-387-23313-X_10