The dual beam incorporates both a focused ion beam (FIB) and a scanning electron microscope (SEM) in a single system. This combination offers several advantages over a single-beam FIB system, especially for sample preparation and microscopy applications, in which the ion beam can be used for site-specific material removal and the SEM for nondestructive imaging and analysis. Dual-beam system configurations are presented, along with a number of key techniques and applications. These include precision cross-sectioning, TEM sample preparation, and automated 3D process control.
Keywords:
dual beam; FIB; SEM; failure analysis; process control; 3D metrology; TEM sample preparation; automation; nanofabrication; EBSD; cryo