Micro components are finding many new applications every day. Since systems at micro scale have reduced size and weight, they have lower energy consumption and can provide mobile systems with more complexities and capabilities. Fabrication of micro sized devices has been achieved mainly through photolithography based methods. However, shortcomings of photolithographic methods call for other methods of producing micro/nano components. Mechanical micro/nano machining, which is removing material by engaging a micro/nano sized tool on the workpiece, can be a substitute for photolithographic methods. In comparison with photolithographic methods, the machining method can process a wider range of workpiece materials, can fabricate complex geometries, has lower investment, and avoids hazardous chemicals.

The issues involved with mechanical machining are mainly due to the lack of knowledge about the deformation process in micro/nano scale and the fragility of miniature tools. The edge radius of tool is comparable to chip thickness resulting in new cutting phenomena that arise in machining at micro/nano scale due to size effects, and elasto-plastic nature of workpiece. These issues would affect the accuracy and surface finish of machined components.

Due to diversity of applications of mirco/nano components, materials with high resistively to different conditions like glasses, silicon, and ceramics that have high stiffness, hardness, corrosion resistance and high temperature strength play an important role in modern engineering, and for the capability to provide anodic bonding between two glass surfaces it has special importance. Studies show that when the chip thickness is comparable to the edge radius of tool, brittle materials behave as ductile materials in cutting. Such behaviour is explained by the high hydrostatic pressure around the edge radius that compresses the brittle material without providing enough intensity to cause crack formation.

Cutting properties of glass and the effect of machining parameters on ductile cutting of soda lime glass are investigated in this work through micro and nano scale machining processes. A precision micro CNC is used to perform micro-scratching and torus end milling tests on soda lime glass. The observations in both tests are compared and the cutting forces in micro-scratching are simulated based on the extracted cutting parameters. In addition, nano machining tests using an atomic force microscope (AFM) probe as a scratching tool are conducted to find the cutting mechanism in glass at nano scale. This study provides invaluable information on the behaviour of glass in different cutting conditions and provides a comparison between the properties of this material in micro and nano scale machining. The in-depth investigations of cutting mechanisms in micro/nano scale provide important insights in the processing of brittle materials, and improve quality and productivity of micro/nano mechanical machining proc