Fast Growth of Microcrystalline Silicon Thin-Films from Dichlorosilane by the High-Density Microwave Plasma Source Using the Spoke Antenna for Si Thin-Film Solar Cells

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Saha, Jhantu Kumar

Fast Growth of Microcrystalline Silicon Thin-Films from Dichlorosilane by the High-Density Microwave Plasma Source Using the Spoke Antenna for Si Thin-Film Solar Cells

[PhD thesis]. Saitama University

2008

Links

URL: https://sucra.repo.nii.ac.jp/records/9634